Vaega faapitoa uma
Mea Fa'apipi'i Fa'aleaganu'u
CMP fa'alelei abrasive
slurry fa'aola CMP
CMP fa'alelei abrasive
slurry fa'aola CMP

CMP fa'alelei abrasive


Nofoaga o le Amataga: ōmea
Igoa Brand: Semixlab
Numera faataitaiga: SXL-1
Tusi Faamaonia: ISO14001, ISO45001, ISO9001
Lafoga Faʻatonu Aupito Manaomia: Fa'atatau ile feutagaiga
tau: Fa'afeso'ota'i mo upusii fa'apitoa
Faʻamatalaga: Tagavai auina atu i fafo
Taimi Faaooina atu: 15-30 Aso Ina ua maeʻa le faʻamaoniga o Poloaiga
Tuutuuga totogi: T / T
Gafatia Tuuina atu: 10 tone/Masina
faʻamatalaga

CMP (Chemical Mechanical Planarization) polishing abrasive o se mea autu i le fanua o semiconductor gaosiga, tioata mata, integrated circuits, ma isi, ma ausia nano-level luga mafolafola e ala i le synergistic aafiaga o kemikolo corrosion ma masini olo.

talosaga:

CMP polishing abrasives o mea autu taua i le fanua o le tuufaatasia matagaluega gaosiga ma e mafai ona faaaoga i le tuufaatasia matagaluega ILD, semiconductor monocrystalline silicon wafers, semiconductor silicon carbide, integrated circuit paʻu vavae vavaeeseina (STI), tuufaatasia matagaluega polysilicon (Poly - Si), uamea matagaluega tuufaatasia ma apa pa uamea.

Au'aunaga e mafai ona tu'uina atu:

su'esu'ega fa'ata'ita'iga a tagata fa'atau, mea fa'atusa, fa'afitauli fa'atekinisi.

Faʻamatalaga o le kamupani:

Semixlab ei ai 2 fale suʻesuʻe, o se vaega o tagata atamamai ma 20 tausaga o meafaitino poto masani, faʻatasi ai ma le R&D ma le gaosiga, suʻega ma faʻamaoniga gafatia.

auiliili

Fa'ailoga Fa'atinoga mo 'Oloa Fa'asologa o Fa'asologa o Fa'asologa Fa'amama-Mama

Parameter SXL-1 SXL-2 SXL-3 SXL-4 SXL-5 SXL-6 SXL-7
Ole SilicaParticle Tele/nm 35 ± 5 45 ± 5 65 ± 5 75 ± 5 85 ± 5 100 ± 5 120 ± 5
Nanoparticle SizeDistribution (PDI)
Fofo pH 7.2-7.4 7.2-7.4 7.2-7.4 7.2-7.4 7.2-7.4 7.2-7.4 7.2-7.4
Mea mautu/% 20.5 ± 0.5 20.5 ± 0.5 20.5 ± 0.5 20.5 ± 0.5 20.5 ± 0.5 20.5 ± 0.5 20.5 ± 0.5
Faʻaaliga malamalama Blue Lanu moaga Lanu pa'epa'e Paʻe-paʻepaʻe Paʻe-paʻepaʻe Paʻe-paʻepaʻe Paʻe-paʻepaʻe
Fa'amatalaga Fa'amatalaga X X:S- pherical;B- Pi'opi'o;P- Fa'atusa pinati;T- Bulbous;C- Pei o filifili (tulaga tu'ufa'atasi)
Fa'amautu ions Organic/Inorganic Amines
Mea mata'utia Fa'avasega Y Y:M-TMOS;E-TEOS;ME-TMOS+TEOS;EM-TEOS+TMOS
Uamea Fa'aleaga Mea ≤300ppb
talosaga

Avanoa autu o talosaga

Fa'atonuga ole talosaga Fa'aaliga masani
Gaosiga Semiconductor Tu'ufa'atasi Circuit (IC) Chips ma Tulaga Tolu Mea Fa'atonu Semiconductor
Mata ma Fa'aaliga Tekinolosi Mata tioata, tioata ma fa'aaliga fa'aaliga
Mea e teuina ai Pepa tisiki malo ma le 3D NAND flash memory
Fa'apipi'i Fa'apitoa Fa'apipi'i tulaga fa'ama'i (WLP), TSV (e ala atu i le silikoni)
O isi fa'aoga maualuga MEMS (Micro-Electro-Mechanical Systems) ma Totoga Faʻafomaʻi

Fa'amaoniga ole filifili ole si'osi'omaga

Semixlab CMP polishing abrasives faʻafeiloaʻi le tusipasi semiconductor alamanuia ma ua pasia le ISO 14001/45001/9001 tusipasi

Fa'asologa masani o talosaga

Mea mata → Abrasive Synthesis (Suiga i luga) → Slurry Formation (Filtration/PH fetuunaiga)→ CMP polishing (EPD control)→ Post-Clean → Inspection (AFM/KLA)→ Data Feedback Optimization

E ala i le faʻaogaina o le faʻasologa o mea, Semixlab CMP polishing abrasive ua ausia le alualu i luma i le tulaga o le eletise eletise semiconductor i totonu o le atunuʻu, faasolosolo malie ona suia oloa mai fafo i le maketi semiconductor, ma ua faʻaaogaina lelei i le gaosiga ma le gaosiga o LCD, OLED ma isi faʻaaliga faʻaaliga. Afai e te manaʻomia le mauaina o pepa paʻepaʻe faʻapitoa faʻapitoa poʻo le faʻatulagaina o suʻega faʻataʻitaʻiga, faʻamolemole faʻafesoʻotaʻi la matou vaega lagolago faʻapitoa.

Faʻamanuiaga Faʻamasino

Semixlab CMP fa'alelei abrasive autu lelei

a. E mafai ona fetuutuunai fua le lautele o vaega laiti ma le tikeri o le tuufaatasiga o vaega laiti;

b. Monodisperse vaega fa'atasi ma le fa'asoaina o lapopo'a tutusa;

c.Stable dispersion system;

d.Tele-tele le gaosiga gafatia ma le laititi o le batch-to-batch fesuiaiga;

e.E maualuga le mautu, e tetee atu i le faʻapipiʻiina ma le palapala.

tatou Auaunaga

Semixlab Fa'atau oloa

Semixlab CMP fa'alelei faleoloa abrasive

fesili

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