Semiconductor quartz wafer

O le Semixlab Semiconductor Quartz Wafer o se mea fa'apipi'i sa'o, silica fa'apipi'iina silica substrate fa'apipi'iina e sili atu le mama ua fa'atulagaina mo le mana'omia o si'osi'omaga o le gaosiga o semiconductor.

O lo'o fa'aaogaina lautele e pei o se fa'ama'i mama, va'ava'a va'ava'a, mea fa'apipi'i, ma fa'avae photomask i fa'ama'i vevela, CVD/LPCVD, PECVD, ma lithography system.

Faʻainisinia mai le 99.99% maualuga-mama SiO₂, o lenei quartz wafer e ofoina atu le faʻamautuina o le vevela, vailaʻau inertness, ma le manino faʻapitoa, faʻamautinoa le faʻaogaina ma le leai o se faʻaleagaina i laina gaosiga semiconductor.

Ⅰ. Meatotino ma Meatotino i luga

● Mea: Silica fused po'o le natura (SiO₂ ≥ 99.99%).

● Filifiliga Diameter: 2", 4", 6", 8", 12" (o lapopoa masani e maua).

● Fa'ai'uga Fa'a'ele'ele: Fa'alilolilo itu-lua, fa'amafola ≤ 5 μm, fa'aola luga ≤ 0.5 nm.

● Tete'e vevela: Fa'amautu e o'o atu i le 1200°C fa'aauau pea galuega.

● Fa'ateleina Fa'avela: 5.5 × 10⁻⁷ /°C.

● Optical Transmission: >90% mai le 190 nm i le 2,600 nm.

E faia su'esu'ega fa'apitoa ta'itasi, fa'amautinoaga, ma su'esu'ega mama e fa'amautinoa ai le tausisia atoatoa o mana'oga semiconductor-grade.

Ⅱ. Galuega Autu i Fa'agasologa Semiconductor

1. Fa'agasolo Fa'asologa i le CVD ma le LPCVD Systems

E fa'aogaina u'amea quartz e pei o le dummy po'o le spacer wafe e fa'amautu le tafe kesi ma le tutusa o le vevela i le taimi o le SiO₂, Si₃N₄, ma le polysilicon thin-film deposition. O lo latou sa'o atoatoa e fa'amautinoa ai le tuputupu a'e o ata tifaga ma le fa'atupuina o ni vaega laiti i taimi uma o fa'aputuga.

2. Talosaga Oxidation and Diffusion Ogaumu

I le maualuga o le vevela o le oxidation ma le dopant diffusion process, o quartz wafers e fai ma talipupuni vevela poʻo le siakiina o gaioiga, faʻatumauina tutusa le tufatufaina o le vevela ma puipuia le faʻaleagaina o faʻamaʻi gaosiga.

3. Fa'aogaina o mata ma Lithography

Fa'afetai i le maualuga o le transmittance ma le fa'asologa o fa'asino igoa, o le quartz wafer e lelei mo le fauina o ata, mea e fa'aalia ai le DUV, ma mea faigaluega fa'avasega. E fa'amaonia ai le fa'aauau pea o moli mo le i-line, KrF, ma le ArF lithography system.

4. Si'osi'omaga Plasma ma Etching

I faʻamago faʻamago ma plasma CVD faiga, quartz wafers e faʻaaogaina e fai ma talipupuni potu poʻo faʻamalama plasma, e ofoina atu le malosi dielectric sili ona lelei ma le faʻamaʻiina o vailaʻau e faasaga i kasa faʻavae halogen (CF₄, SF₆, Cl₂).

5. Fa'ata'atiaga o Meafaigaluega ma Meafaigaluega

O u'amea kuata e fai ma fa'amaufa'ailoga mo le mafiafia ata, vevela, ma le fa'avasegaina mafolafola. O latou pito sili ona lamolemole, leai se fa'aletonu e mafai ai ona sa'o ma toe fai fua fua, fa'amautinoaina le mautu o le fa'agasologa.

Talosaga masani

● Dummy wafer mo faiga CVD, LPCVD, ma PECVD

● Fa'agaioiga fa'alava po'o le talipupuni fa'amalama i totonu o ogaumu fa'ama'i ma fa'asalalauina

● Photomask substrate mo UV/DUV lithography

● Fa'asinomaga wafer mo le fa'avasegaina o masini ma le fa'ata

● Faamalama potu Plasma ma faiga etching puipuiga

O le Semixlab Semiconductor Quartz Wafer o se mea e fa'atino maualuga le fa'ainisinia mo faiga e sili ona mana'omia semiconductor. O lona mautu o le vevela, sa'o sa'o, ma le mama o vaila'au e mana'omia i le fa'aputuina, fa'ama'iina, lithography, ma le fa'aogaina o su'esu'ega. Faʻatasi ai ma faʻasalalauga faʻapitoa ma lagolago faʻainisinia, Semixlab e tuʻuina atu fofo e faʻateleina ai le faʻagasologa o le faagasologa, faʻatuatuaina fua, ma le faʻaogaina lelei. Matou te faʻamoemoe faʻamaoni e avea ma au paaga umi i Saina.